SPEC scans from: /share1/USAXS_data/2023-02/02_15_FZHEATi3Al1/02_15_FZHEATi3Al1.dat
spec file:
/share1/USAXS_data/2023-02/02_15_FZHEATi3Al1/02_15_FZHEATi3Al1.dat